METHOD TO DETECT SURFACE METAL CONTAMINATION

申请公布号：WO2002029883(A1)

申请号：GB2001004454

申请日期：2001.10.05

申请公布日期：2002.04.11

摘要：<p>A method for detecting surface or near surface metal contamination in a semiconductor or silicon structure is described in which the structure or a part thereof is exposed to an excitation beam of predetermined wavelength and collecting luminescence from the structure in as the form of PL map having a substantially uniform PL intensity level provided by the semiconductor; and inspecting the map for one or more regions of enhanced PL intensity identifying characteristic surface or near surface metal contamination. In particular, the method is applied as an in-process quality control or as a quality control of processed structures such as interconnects.</p>

MEHRSCHICHTIGE, GEDRUCKTE LEITERPLATTE UND VERFAHREN ZU IHRER AUSLEGUNG

AMINACARYL ESTERS AND AMINO-LOWER ALKYL AMIDES OF CARBOXY SUBSTITUTED BARBITURATES AND IN DETECTION OF BARBITURATES N BODY FLUIDS

CAP WITH FLEXIBLE LINER

ELECTRIC STORAGE BATTERIES

PACKING MACHINES

RUDDER POSITION DIGITAL INDICATOR

COLOR TELEVISION RECEIVER

FUEL INJECTION DEVICE FOR INTERNAL COMBUSTION ENGINE

MILK INSPECTION APPARATUS

SPORTS AND GAME INSTALLATION COMPRISING A RIDABLE RAMP

BALL RETRIEVING AND STORAGE DEVICE

PIPERAZINE DERIVATIVES AND PHARMACEUTICAL COMPOSITIONS

INSULATED BUSBARS IN CONTROL CENTRE

PRODUCTION OF A FIBROUS HIGH-PROTEIN FOOD FROM MILK

VACUUM PACKAGING AND PRESERVING POULTRY

FORMING PRIMARY BACKING FOR TUFTED CARPETS WEB BONDED TO SUBSTRATE

PRODUCTION OF FIBROUS HIGH-PROTEIN FOOD FROM MILK

EAR TAG APPLICATOR RETRACTING PIN

BENZOPYRAN AND BENZOTHIOPYRAN DERIVATIVES

GASSCLEANING APPARATUS