METHOD OF CLEANING ELECTRONIC DEVICE,申请号EP2001011391-传众专利搜索

METHOD OF CLEANING ELECTRONIC DEVICE

申请公布号：WO2002029857(A1)

申请号：EP2001011391

申请日期：2001.10.01

申请公布日期：2002.04.11

摘要：<p>A method of manufacturing an electronic device, in particular but not exclusively a semiconductor device, in which method a substrate (2) is placed inside a process chamber (1) and a surface (3) of the substrate (2) is subjected to a cleaning process sequence comprises the steps of: subjecting the surface (3) of the substrate (2) to a wet cleaning treatment, purging the process chamber (1) with an inert gas while keeping the surface (3) of the substrate (2) wet, drying the surface (3) of the substrate (2).</p>

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