PIEZOELECTRIC/ELECTROSTRICTIVE DEVICE AND METHOD OF ITS MANUFACTURE,申请号JP20000182354-传众专利搜索

PIEZOELECTRIC/ELECTROSTRICTIVE DEVICE AND METHOD OF ITS MANUFACTURE

申请公布号：JP2001320099(A)

申请号：JP20000182354

申请日期：2000.06.16

申请公布日期：2001.11.16

申请人：

NGK INSULATORS LTD

发明人：TAKEUCHI YUKIHISA;SHIBATA KAZUYOSHI;IKEDA KOJI

分类号：H01L41/083;H01L41/08;H01L41/09;H01L41/187;H01L41/22;H01L41/335;H02N2/00

主分类号：H01L41/083

摘要：PROBLEM TO BE SOLVED: To enhance impact resistance of a device. SOLUTION: The piezoelectric/electrostrictive device 10 comprises a pair of thin plate parts 12a, 12b disposed oppositely, and a fixed part 14 for supporting the thin plate parts 12a, 12b wherein the pair of thin plate parts 12a, 12b are arranged, respectively, with piezoelectric/electrostrictive elements 18a, 18b. Movable parts 20a, 20b have end faces 34a, 34b facing each other and air gap parts 20c, 20d are formed, while being filled with a filler, in a border line bonding the thin plate parts 12a, 12b, the fixed part 14, and the movable parts 20a, 20b.