HEATING DEVICE OF SUBSTRATE FOR LIQUID CRYSTAL DISPLAY PANEL
申请公布号:JP2001117080(A)
申请号:JP19990295329
申请日期:1999.10.18
申请公布日期:2001.04.27
发明人:ITO TOSHIKI;KANO TAKAMASA;NORO TADASHI
分类号:H01L21/683;C03B29/02;C03B32/00;C03C27/06;C23C14/34;C23C16/50;G02F1/13;G02F1/1333;G02F1/1339;H01L21/205;H01L21/31;(IPC1-7):G02F1/133
主分类号:H01L21/683
摘要:<p>PROBLEM TO BE SOLVED: To provide a heating device of a substrate for a liquid crystal display plate, which has a supporting plate having excellent shock resistance and processability and causing no distortion or dropping of powder. SOLUTION: The heating device 1 is equipped with a supporting plate 11 to support a glass substrate 2 which constitutes a liquid crystal display panel in the production process of a liquid crystal display plate, and a heat generating means 12 to generate heat in the supporting plate 11 to heat the glass substrate 2. The supporting plate 11 partly or wholly consists of a carbon-coupled carbon fiber composite material.</p>