Piezoelectrical mechanical actuators for use with small actuator distances and arrays,申请号US19990425631-传众专利搜索

Piezoelectrical mechanical actuators for use with small actuator distances and arrays

申请公布号：US6204811(B1)

申请号：US19990425631

申请日期：1999.10.22

申请公布日期：2001.03.20

申请人：

CTS CORPORATION

发明人：PHILLIPS JAMES R.

分类号：H01L41/04;H01L41/107;H01P1/18;H01Q3/32;H01Q3/36;H02N2/06;(IPC1-7):H01P1/18

主分类号：H01L41/04

摘要：A piezoelectric actuator control circuit includes a first conductor attached to the free end of a piezoelectric device and a second conductor rigidly fixed at a position spaced from the piezoelectric device such that a variable capacitor is created between the first and second conductors. The variable capacitor is then used in a capacitive voltage divider to generate a drive signal which moves the piezoelectric device. Thus, the movement of the piezoelectric device can be precisely controlled. The control circuit allows for precise control of an array of such piezoelectric actuators and is particularly applicable to the use of actuators for controlling a mmWave phase array antenna.