Nanoporous polymer films for exteme low and interlayer dielectrics

申请公布号：IL132907(D0)

申请号：IL19990132907

申请日期：1999.11.12

申请公布日期：2001.03.19

申请人：

AIR PRODUCTS AND CHEMICALS, INC.

分类号：C08J9/00;C08J9/28;H01B3/30;H01B3/42;H01B3/44;H01L21/312;H01L21/316;(IPC1-7):C08J

主分类号：C08J9/00

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