DISPLAY PANEL MANUFACTURING DEVICE AND MANUFACTURING METHOD USING THE SAME

申请公布号：KR20090023905(A)

申请号：KR20070089019

申请日期：2007.09.03

申请公布日期：2009.03.06

申请人：

SAMSUNG SDI CO., LTD.

发明人：PARK, JONG HEAK;YOON, HYUNG SEOK;KIM, SI JIN

分类号：H01J9/24;H01J11/20

主分类号：H01J9/24

摘要：A display panel manufacturing device and manufacturing method using the same is provided to form a partition uniformly by making inside of a chamber vacuum condition. An etching object is equipped in the inside of chamber, and an etchant is emitted to the etching object(S1). The etching object is etched with the etchant(S2). The vacuum condition is and the etchant which is left behind on the etching object is evaporated(S3). The etchant particle is ejected to the chamber outside, and the etching object is the partition generation layer of the plasma display panel.

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