Friction vacuum pump,申请号US19990242004-传众专利搜索

Friction vacuum pump

申请公布号：US6168374(B1)

申请号：US19990242004

申请日期：1999.02.05

申请公布日期：2001.01.02

申请人：

LEYBOLD VAKUUM GMBH

发明人：STOLLE ROBERT;ODENDAHL HEINZ-DIETER;BEYER CHRISTIAN

分类号：F04C23/00;F04D19/04;(IPC1-7):F01D1/36

主分类号：F04C23/00

摘要：The present invention relates to a friction vacuum pump having at least one turbomolecular pump stage (2) joined at its pressure side to a screw pump stage (4). In order to improve the pump properties it is proposed that a filling stage (3) be arranged between the turbomolecular pump stage (2) and the screw pump stage (4) that has blades (13) whose length corresponds at the suction side to the active length of the blades at the pressure side of the turbomolecular pump stage (2), and at the pressure side to the depth of the suction-side region of the screw (14) of the screw stage (4).