CUTOUT PART ALIGNMENT METHOD AND DEVICE THEREOF,申请号JP19990064764-传众专利搜索

CUTOUT PART ALIGNMENT METHOD AND DEVICE THEREOF

申请公布号：JP2000260853(A)

申请号：JP19990064764

申请日期：1999.03.11

申请公布日期：2000.09.22

申请人：

TOKYO ELECTRON LTD

发明人：TAKEUCHI YASUSHI;ISHII KATSUTOSHI

分类号：H01L21/68;(IPC1-7):H01L21/68

主分类号：H01L21/68

摘要：<p>PROBLEM TO BE SOLVED: To set a cutout part to an arbitrary position by rotating a body again to be treated after aligning the cutout part. SOLUTION: In a cutout part alignment method, a plurality of bodies to be treated with a cutout part 1 at the surrounding are rotated by a drive shaft 11, while they are accommodated in a container 2, and the cutout part 1 is engaged to the drive shaft 11, thus aligning the cutout part 1. In this case, after the cutout part 1 is aligned, the drive shaft 11 is shifted from the position of the cutout part 1 and a body (w) to be treated is rotated again by the drive shaft 11 at the shifted position, thus setting the cutout part 1 to an arbitrary position.</p>