INSPECTION STAGE AND DEVICE

申请公布号：JP2000260852(A)

申请号：JP19990064997

申请日期：1999.03.11

申请公布日期：2000.09.22

申请人：

TOKYO ELECTRON LTD

发明人：TAKEKOSHI KIYOSHI

分类号：H01L21/68;G01R31/28;H01L21/66;(IPC1-7):H01L21/68

主分类号：H01L21/68

摘要：<p>PROBLEM TO BE SOLVED: To provide an inspection stage for ensuring inspection reliability by drastically reducing the inclination of a chuck top (placement stand), even if a probe card is made into a plurality of pins and multiple levels. SOLUTION: An inspection stage 14 is provided with a chuck top 21 for placing a wafer W, a Z base 20 that can be elevated while the chuck top 21 is arranged, an X stage 19 that supports the Z base 20 so that it can be elevated and can travel in the X direction, and a Y stage 17 that supports the X stage 19 so that it can travel in the X-direction and travels in the Y direction. The Z base 20 is provided with three Z-axis elevation drive mechanisms 25 and supports the Z base 20, via each of the Z-axis elevation drive mechanisms 25.</p>

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