VERTICAL ACCELERATION TIME-OF-FLIGHT TYPE MASS SPECTROGRAPH,申请号JP19990064380-传众专利搜索

VERTICAL ACCELERATION TIME-OF-FLIGHT TYPE MASS SPECTROGRAPH

申请公布号：JP2000260389(A)

申请号：JP19990064380

申请日期：1999.03.11

申请公布日期：2000.09.22

申请人：

JEOL LTD

发明人：NUKINA YOSHIHIRO

分类号：H01J27/10;G01N27/62;H01J49/06;H01J49/40;(IPC1-7):H01J49/40

主分类号：H01J27/10

摘要：PROBLEM TO BE SOLVED: To accumulate ion beams from a plurality of ion sources in an ion reservoir at the same time, emit them, and simultaneously, accurately measure the mass spectra of a plurality of ion beams. SOLUTION: Two ion sources 1, 1' are symmetrically arranged to an ion reservoir 3. The ion reservoir 3 is constituted with a pushing-out plate 4, a grid 5, and an intermediate electrode 11. In the case where ions are accumulated in the reservoir 3, the pushing-out plate 4 is kept at an earth potential, and negative voltage Vw is applied to the intermediate electrode 11. Ion beams from the two ion sources keep almost a focused state and fly in the (y) direction within the ion reservoir 3. A spatial spread in the (z) direction of ions within the ion reservoir 3 can be suppressed at the minimum, a spread of kinetic energy of ions when emitted from the ion reservoir 3 as an ion pulse can be minimized, and therefore, mass resolution can be enhanced.