THIN FILM MICROMIRROR ARRAY-ACTUATED DEVICE,申请号KR19980061327-传众专利搜索

THIN FILM MICROMIRROR ARRAY-ACTUATED DEVICE

申请公布号：KR20000044827(A)

申请号：KR19980061327

申请日期：1998.12.30

申请公布日期：2000.07.15

申请人：

DAEWOO ELECTRONICS CO., LTD.

发明人：CHOI, YOUNG JUN

分类号：G02F1/015;(IPC1-7):G02F1/015

主分类号：G02F1/015

摘要：PURPOSE: A TMA device is provided to improve driving effect by extending the driving length of the actuator and by solving the problem of the driving length being limited or minimized. CONSTITUTION: A device comprises an active matrix(5), a drain pad(60c), a membrane(130), a lower electrode(135), an electroplasive(140), an upper electrode(145), an actuator(100), a via contact(155), a common electrode line(160), an insulation layer(162), a conductive layer(165), and a driving mirror(200). The driving substrate includes the transistor and the protection layer is formed on the upper part of the driving substrate. The MOS transistor includes the gate poly, source area, and the drain area. The low temperature oxide and the metal layer are formed on the MOS transistor and the insulation layer is formed on the metal layer. The actuator is formed on the protection layer and the driving mirror is formed on the actuator. The common electrode line is formed between the actuator and the actuator driving part and an end of the actuator supporting part is electrically connected with the drain pad of the driving substrate by the via contact.