Method of manufacturing electron-emitting device and image-forming apparatus comprising such devices,申请号US19970961223-传众专利搜索

Method of manufacturing electron-emitting device and image-forming apparatus comprising such devices

申请公布号：US6063453(A)

申请号：US19970961223

申请日期：1997.10.30

申请公布日期：2000.05.16

申请人：

CANON KABUSHIKI KAISHA

发明人：TOMIDA, YOSHINORI;KAWADE, HISAAKI;NIIBE, MASAHITO;OHNISHI, TOSHIKAZU;OKAMURA, YOSHIMASA

分类号：H01J1/316;H01J9/02;(IPC1-7):B05D3/00;B05D5/12;C23C16/00

主分类号：H01J1/316

摘要：An electron-emitting device having an electroconductive film including an electron-emitting region and arranged between a pair of electrodes is manufactured by forming an electroconductive film on a substrate and producing an electron-emitting region in the electroconductive film. The electroconductive film is formed on the substrate by heating the substrate in an atmosphere containing a gasified organic metal compound to a temperature higher than the decomposition of the gasified organic metal compound.