SEMICONDUCTOR DETECTING DEVICE,申请号JP19980309758-传众专利搜索

SEMICONDUCTOR DETECTING DEVICE

申请公布号：JP2000138280(A)

申请号：JP19980309758

申请日期：1998.10.30

申请公布日期：2000.05.16

申请人：

KOKUSAI ELECTRIC CO LTD

发明人：SHINO KAZUHIRO;TOMEZUKA KOJI

分类号：H01L21/67;H01L21/68;(IPC1-7):H01L21/68

主分类号：H01L21/67

摘要：<p>PROBLEM TO BE SOLVED: To detect the presence or absence of a substrate on a substrate- carrying plate. SOLUTION: A substrate-detecting device has substrate detecting sensors for detecting a substrate 5 on a substrate-carrying plate 16, each of which is constituted by a light-projecting sensor 26 and a light-receiving sensor 27, wherein the radiation directions of the detecting lights from the light projecting sensor 26 are not opposed to each other, and correctly detects the presence or absence of the substrate on the substrate-carrying plate.</p>