FREQUENCY ADJUSTING DEVICE FOR CRYSTAL VIBRATOR,申请号JP19980232307-传众专利搜索

FREQUENCY ADJUSTING DEVICE FOR CRYSTAL VIBRATOR

申请公布号：JP2000059164(A)

申请号：JP19980232307

申请日期：1998.08.04

申请公布日期：2000.02.25

申请人：

NIPPON DEMPA KOGYO CO LTD

发明人：SATO TOMOHIRO

分类号：H03H3/04;(IPC1-7):H03H3/04

主分类号：H03H3/04

摘要：PROBLEM TO BE SOLVED: To make an efficient frequency adjustment in a short time by providing a vapor-depositing mechanism which forms a metal thin film on a crystal piece by vapor deposition to lower the resonance frequency and an etching mechanism which etches the metal thin film formed on the crystal piece to raise the resonance frequency. SOLUTION: A ring-shaped hold frame 2 held rotatably on a pedestal is provided in a vacuum tank 1. The quartz piece 4 held on a base is inserted into each half-through hole 3 of the hold frame 2. The vapor-depositing mechanism 5 and etching mechanism 6 are provided on the reverse surface of the hold frame 2. Quartz pieces 4 right above the vapor-depositing mechanism 5 and etching mechanism 6 are connected to #1 and #2 oscillators 9 and 10 and oscillated at their resonance frequencies. The outputs of the #1 and #2 are measured by a frequency counter 12 and compared by a comparator 13 with a target frequency set previously in a setter 14 and a vapor-deposition and ion gun control part 15 selects one of the vapor-depositing mechanism 5 and etching mechanism 6 according to the comparison result and opens a vapor-deposition shutter 16 or ion gun shutter 17.