MAGNETIC FIELD DETECTION ELEMENT OF DIFFERENTIAL SOLENOID TYPE AND FORMING METHOD OF THE SAME
申请公布号:KR20000007791(A)
申请号:KR19980027304
申请日期:1998.07.07
申请公布日期:2000.02.07
发明人:CHOI, SANG EON;CHO, HAN GI
分类号:H01L43/00;G01R33/04;(IPC1-7):H01L43/00
主分类号:H01L43/00
摘要:PURPOSE: A magnetic field detection device of differential solenoid type is provided to detect an exact magnetic field of high sensitivity by minimizing leakage of magnetic flux. CONSTITUTION: The device comprises a semiconductor substrate; a logo-typed thin film core overlapped up and down to form closed-magnetic circuits on the semiconductor substrate, wherein the circuits are parallel each other; exciting coils of a solenoid type, wherein the exciting coils are thin films for alternative excitation and differential excitation to the thin film core; and magnetic speed change detecting coils of the solenoid type, wherein the detecting coils are formed thin metal film for detecting magnetic speed in the thin film core.