ROTARY JOINT DEVICE,申请号JP19980139900-传众专利搜索

ROTARY JOINT DEVICE

申请公布号：JPH11336970(A)

申请号：JP19980139900

申请日期：1998.05.21

申请公布日期：1999.12.07

申请人：

NIPPON PILLAR PACKING CO LTD

发明人：YAMAZOE YUTAKA

分类号：F16L27/093;(IPC1-7):F16L27/093

主分类号：F16L27/093

摘要：<p>PROBLEM TO BE SOLVED: To provide a rotary joint device for CMP(chemomechanical polishing) capable of ensuring pressure resistance and durability and capable of miniaturization. SOLUTION: A space between a housing 2 and a rotary unit 3 is sealed by a double mechanical seal 4. A slide surface 41a is formed in both end surfaces of one rotary seal rig 41, this rotary seal ring 41 is sandwiched between a pair of stationary seal rings 42. Each stationary seal ring 42 is press energized from behind by a spring 43. A flow path leading to a rotational side fluid supply path 16 through a first fluid passage L1 from a stationary side fluid flow path 18 and a flow path leading to a stationary side fluid collecting path 19 through a second fluid passage L2 from a rotational side fluid collecting path 17 are partitioned by a seal 6 in a closed space S.</p>