GRINDING DRESSER FOR GRINDING DISK OF CHEMICAL MACHINE POLISHER,申请号JP19980112127-传众专利搜索

GRINDING DRESSER FOR GRINDING DISK OF CHEMICAL MACHINE POLISHER

申请公布号：JPH11300600(A)

申请号：JP19980112127

申请日期：1998.04.22

申请公布日期：1999.11.02

申请人：

FUJIMORI GIJUTSU KENKYUSHO:KK

发明人：FUJIMORI KEIICHI;MATSUO JUNJI

分类号：B24B53/00;B24B53/007;B24B53/017;B24B53/12;B24D7/18;B24D18/00;H01L21/304

主分类号：B24B53/00

摘要：PROBLEM TO BE SOLVED: To increase the service life by realizing the surface contact on a contact part with a grinding disk to reduce the wear during the use, and improve the grinding efficiency of the grinding disk in a grinding dresser for the grinding disk of a chemical machine polisher. SOLUTION: An outer circumferential part of a flat disk-like base member 29 is raised with the specified width, and the sectional shape of a grinding surface 31 in which a grinding grid is distributed on a surface of a raised part 30 in an approximately uniform manner is formed of convex arc-shaped curved surface. The wear during the use is reduced to improve the service life by realizing the surface contact at a contact part with a grinding disk of a chemical machine polisher, and the grinding efficiency of the grinding disk can be improved.