MASK PROTECTION DEVICE,申请号JP19950147974-传众专利搜索

MASK PROTECTION DEVICE

申请公布号：JPH08106156(A)

申请号：JP19950147974

申请日期：1995.06.15

申请公布日期：1996.04.23

申请人：

MITSUI PETROCHEM IND LTD

发明人：FUJITA MINORU;NAKAGAWA HIROAKI

分类号：G03F1/64;H01L21/027;(IPC1-7):G03F1/14

主分类号：G03F1/64

摘要：<p>PURPOSE: To enhance responsiveness with respect to the change of temperature or pressure as for a mask protection device constituted so that permeability is given in a state where it is fitted to a mask by forming an air hole on a frame and a thin film is prevented from being swollen or dented because of the change of the temperature or the pressure. CONSTITUTION: A filter 2 covering the air hole 1 is stuck to the outside of the frame by a ring-like double coated adhesive tape surrounding the hole 1 and provided by being separated from the frame. When the area of an effective part where the gas of the filter flows is defined as A and the area of the hole 1 is defined (a), the moving coefficient (k) of the gas at the hole 1 becomes A/a in comparison with a case that the filter 2 is directly fitted to the frame.</p>