Verfahren zur Herstellung einer verbesserte Solarzelle aus säulenförmigem, körnigem, polycrystallinem Silizium,申请号DE1993625764-传众专利搜索

Verfahren zur Herstellung einer verbesserte Solarzelle aus säulenförmigem, körnigem, polycrystallinem Silizium

申请公布号：DE69325764(D1)

申请号：DE1993625764

申请日期：1993.10.06

申请公布日期：1999.09.02

申请人：

ASTROPOWER INC.

发明人：HALL, ROBERT B.;BARNETT, ALLEN M.;BROWN, JACOB E.;CHECCHI, JOSEPH C.;FORD, DAVID H.;KENDALL, CHRISTOPHER L.;MULLIGAN, WILLIAM P.;RAND, JAMES A.;RUFFINS, TODD R.

分类号：H01L31/04;H01L21/36;H01L31/036;H01L31/0368;H01L31/18;(IPC1-7):H01L31/18

主分类号：H01L31/04

摘要：<p>The invention relates to techniques for manufacturing columnar-grained polycrystalline sheets which have particular utility as substrates or wafers for solar cells. The sheet is made by applying granular silicon to a setter material which supports the granular material. The setter material and granular silicon are subjected to a thermal profile all of which promote columnar growth by melting the silicon from the top downwardly. The thermal profile sequentially creates a melt region at the top of the granular silicon and then a growth region where both liquid and a growing polycrystalline sheet layer coexist. An annealing region is created where the temperature of the grown polycrystalline silicon sheet layer in controllably reduced to effect stress relief. <IMAGE></p>