GRIPPER FOR WAFER-LIKE ARTICLE,申请号JP19980168712-传众专利搜索

GRIPPER FOR WAFER-LIKE ARTICLE

申请公布号：JPH1191949(A)

申请号：JP19980168712

申请日期：1998.06.16

申请公布日期：1999.04.06

申请人：

SEZ SEMICONDUCTOR EQUIP ZUBEHOER FUER DIE HALBLEITERFERTIGUNG GMBH

发明人：BIRIBARUTO PIRUKAA

分类号：H01L21/677;B25J15/08;B25J19/00;B65G49/07;H01L21/687;(IPC1-7):B65G49/07;H01L21/68

主分类号：H01L21/677

摘要：PROBLEM TO BE SOLVED: To limitatedly place an article on a support for a wafer-like article by providing a means for preventing individual gripper hooks from being further moved inside in the radial direction than the other respective gripper hooks. SOLUTION: An expansion main body 21 is in contact with a gripper hook 2 or in contact with a component member connected to the gripper hook 2. Accordingly, the spring force applied to the expansion main body 21 is not so large, and force is applied to the gripper hook 2 by a spring 26 provided in association with the expansion main body 21 not to be moved to the innermost under the action of a spring which is provided in relation to the gripper hook 2 and applies load inside in the radial direction to the gripper hook 2. Load is applied to a conical expansion main body 21 by a spring 26 always in contact with a roller 18 provided on a guide body 12, whereby the individual gripper hooks 2 can be kept from being further moved inside than the other gripper hooks 2.