SUBSTRATE CLEANING APPARATUS

申请公布号：JPH10284450(A)

申请号：JP19970105354

申请日期：1997.04.07

申请公布日期：1998.10.23

申请人：

DAINIPPON SCREEN MFG CO LTD

发明人：NISHIMURA JOICHI;OTANI MASAMI;IMANISHI YASUO;TSUJI MASAO;IWAMI MASAKI;MORITA AKIHIKO

分类号：H01L21/205;H01L21/304;(IPC1-7):H01L21/304

主分类号：H01L21/205

BORON NITRIDE NANOTUBES AND PROCESS FOR PRODUCTION THEREOF

METHOD FOR PREVENTING DETERIORATION OF UNSENSITIZED LATEX REAGENT

RAIL LOADING AND UNLOADING MACHINE

SOLENOID VALVE

Electrical HV Transmission Power Cable

METHOD FOR REAL TIME VIDEO PROCESSING INVOLVING CHANGING A COLOR OF AN OBJECT ON A HUMAN FACE IN A VIDEO

Methods and Voice Activity Detectors for a Speech Encoders

DSD DECODER AND AUDIO SYSTEM

Method and System for Generating a Control Command

CORRECTING VOICE RECOGNITION USING SELECTIVE RE-SPEAK

Cost-Effective In-Bin Primitive Pre-Ordering In GPU

HEAD MOUNTED DISPLAY DEVICE AND CONTROL METHOD FOR HEAD MOUNTED DISPLAY DEVICE

METHOD OF MAPPING SOURCE COLORS OF IMAGES OF A VIDEO CONTENT INTO THE TARGET COLOR GAMUT OF A TARGET COLOR DEVICE

ORGANIC LIGHT-EMITTING DIODE DISPLAY

Electronic Device Display with Zigzag Pixel Design

ORGANIC LIGHT EMITTING DIODE DISPLAY

Imaging for Foldable Displays

Anatomical Model and Method for Surgical Training

FACILITATING HABIT FORMATION THROUGH USE OF MOBILE DEVICES

METHOD AND DEVICE FOR REDUCING A HAZARD TO AND/OR BY A VEHICLE SITUATED ON A PARKING LOT