Flexible skin incorporating mems technology

申请公布号：AU6533598(A)

申请号：AU19980065335

申请日期：1998.01.23

申请公布日期：1998.08.18

申请人：

CALIFORNIA INSTITUTE OF TECHNOLOGY

发明人：YU-CHONG TAI;JIANG FUKANG;HO CHIHMING

分类号：B81B3/00;B81B7/00;B81C1/00;H01L21/301

主分类号：B81B3/00

摘要：A flexible skin formed of silicon islands encapsulated in a polyimide film. The silicon islands preferably include a MEMS device and are connected together by a polyimide film (preferably about 1-100 mu m thick). To create the silicon islands, silicon wafers are etched to a desirable thickness (preferably about 10-500 mu m) by Si wet etching and then patterned from the back side by reactive ion etching (RIE).

Säulen-Platten-Verbindung

PROCESS FOR APPLYING ANTIBACTERIAL AND ANTIMICROBIAL ENAMEL BASED ON RUTILE PARTICLES COATED WITH SILVER NANOPARTICLES OVER CERAMIC PRODUCTS.

SELF-EXPANDING DEVICE OF LUMBAR INTERVERTEBRAL FUSION.

AEROTHERMAL CHAMBER.

PLASMA DRY REFORMING APPARATUS

APPARATUS AND METHOD FOR ANALYSIS OF A SAMPLE HAVING A SURFACE LAYER

Wellenleiter

Riblet-Struktur auf einer Strömungsfläche, Verfahren zum Herstellen einer Riblet-Struktur auf einer Strömungsfläche und Verwendung von Verstärkungselementen in Riblets für eine Strömungsfläche

Antriebseinheit

APPARATUS FOR DRIVING A SWITCHING DEVICE IN A SAFETY-ORIENTED MANNER VIA AN AS-I SYSTEM

Feinschleifmaschine

Mobilkommunikationsendgerät und -verfahren

Verfahren und Vorrichtung zur Erhöhung der Messgenauigkeit eines Hochdrucksensors

LIQUID-FILLING DELIVERY TUBE ADAPTOR OF A PORTABLE REFILLABLE LIQUID RECEPTACLE

SELECTIVE SPATIAL AUDIO COMMUNICATION

COAST STOP VEHICLE AND CONTROL METHOD FOR THE SAME

METHOD FOR ECONOMICAL EXTRACTION OF LITHIUM FROM SOLUTION INCLUDING LITHIUM

PORPHYRIN DERIVATIVES, ORGANIC DYE SENSITIZERS CONTAINING THE SAME FOR HIGHLY EFFICIENT DYE-SENSITIZED SOLAR CELLS AND DYE-SENSITIZED SOLAR CELLS CONTAINING THE SAME

SOLAR CELL

A METHOD AND A DEVICE FOR COMPUTER ASSISTED SURGERY