Vorrichtung zum Messen des Kristalldurchmessers,申请号DE1993617096-传众专利搜索

Vorrichtung zum Messen des Kristalldurchmessers

申请公布号：DE69317096(D1)

申请号：DE1993617096

申请日期：1993.11.27

申请公布日期：1998.04.02

申请人：

SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP

发明人：HIRANO, YOSHIHIRO, C/O ISOBE PLANT, ANNAKA-SHI, GUNMA 379-01, JP;BABA, MASAHIKO, C/O ISOBE PLANT, ANNAKA-SHI, GUNMA 379-01, JP

分类号：C30B15/26;C30B35/00;G01B11/08;G01B11/10;(IPC1-7):G01B11/10

主分类号：C30B15/26

摘要：The growing portion of a single crystal 1 grown by the pull method is recorded and the image signal is output to a digitizing circuit 3 that converts the image signal into binary data. A memory device 4 stores the digitized images and the point P at the boundary between dark and light is detected by scanning the stored digitized images starting from the scanning-start pixel and proceeding in the direction parallel to the direction of single crystal pulling. The diameter D of the growing portion of the single crystal is determined based upon the boundary P, and the scanning-start pixel for the current operation is set at the pixel that is separated from the boundary Pb in the preceding operation by a preset number of pixels d in the opposite direction of the scan. <IMAGE>