THIN FILM CAPACITANCE ELEMENT AND ITS MANUFACTURING METHOD

申请公布号：JPH0969605(A)

申请号：JP19950246652

申请日期：1995.08.31

申请公布日期：1997.03.11

申请人：

SONY CORP

发明人：IMOTO TSUTOMU;NAKAMURA MITSUHIRO;WADA SHINICHI;TANAKA KUNINOBU;YASUSHIGE HIROAKI

分类号：H01L27/04;H01L21/822;(IPC1-7):H01L27/04

主分类号：H01L27/04

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