MANUFACTURE OF SEMICONDUCTOR DEVICE

申请公布号：JPH0922988(A)

申请号：JP19950171190

申请日期：1995.07.06

申请公布日期：1997.01.21

申请人：

NITTETSU SEMICONDUCTOR KK

发明人：NAKANO ATSUSHI

分类号：H01L27/04;H01L21/822;H01L21/8242;H01L27/108

主分类号：H01L27/04

摘要：PROBLEM TO BE SOLVED: To provide a semiconductor device having stacked capacitors capable of obtaining sufficient capacity without increasing the number of manufacturing steps. SOLUTION: After an N-type polycrystal silicon film 23 containing phosphorus is formed on a semiconductor substrate 16 by using a CVD unit, non-doped polycrystal silicon film 24 is formed on the film 23 continuously in the unit. Then, the upper surface formed of the films 23, 24 is formed with an uneven lower electrode 25.

BRAKE

CLOSURES FOR VESSELS

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DOPPLER EFFECT BLOOD FLOW METER

METHOD OF FORMING PLATE WORK HAVING IRREGULAR SURFACES ON PERIPHERY

METHOD OF PRODUCING SPIRAL SPRING WITH RING

VERY HARD TIP ATTACH DETACH TYPE ROTARY CUTTING

FILM UNIT

SEALING DEVICE FOR ROTARY REGENERATIVE HEAT EXCHANGER

OUTPUT ADJUSTING DEVICE FOR ELECTRONIC OVEN

DRIVINGGFIT TYPE PIPING BOX

FLUORESCENT SCREEN PARTICULARLY FOR XXRAYS

FLUORESCENT SUBSTANCES

GREEN LUMINOUS FLUORESCENT DISPLAY TUBE EXCITED BY ELECTRON BEAM OF LO W VELOCITY

PRODUCTION PROCESS OF OXYGEN ABSORBENT FOR FURNISHING IN CONTAINERS OF FOODSTUFFS

METHOD OF FABRICATING SPRING OF HIGH FATIGUE LIMIT

METHOD OF FABRICATING HOT ROLLED WIRE RODS FORMED WITH SCALE EASILY REMOVABLE BY MECHANICAL DESCALING

METHOD OF MAKING ACCESSORY COMBUSTION CHAMBER OF TORCHHIGNITED INTERNAL COMBUSTION ENGINE

METHOD OF AND APPARATUS FOR MEASURING CONCRETE STRENGTH OF CONCRETE STRUCTURE IN FIELD

OPTICAL TRANSMISSION CABLE