METHOD FOR DETERMINING NONUNIFORMITY OF DOPING SEMICONDUCTOR LAYERS ON INSULATING SUBSTRATES
申请公布号:RU2059324(C1)
申请号:SU19904829546
申请日期:1990.05.29
申请公布日期:1996.04.27
发明人:KAZAKEVICH LEONID ALEKSANDROVICH;KUZNETSOV VITALIJ IVANOVICH;LUGAKOV PETR FEDOROVICH;TSIKUNOV ALEKSANDR VLADIMIROVICH
分类号:H01L21/66;(IPC1-7):H01L21/66
主分类号:H01L21/66