PROCESSING METHOD AND PROCESSING DEVICE

申请公布号：JPH0817747(A)

申请号：JP19940166202

申请日期：1994.06.24

申请公布日期：1996.01.19

申请人：

TOKYO ELECTRON LTD;TOKYO ELECTRON TOHOKU LTD

发明人：ARAMI JIYUNICHI;MIYAGI KATSUNOBU

分类号：C23C16/44;C23C16/455;C23C16/54;H01L21/205;(IPC1-7):H01L21/205

主分类号：C23C16/44

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