Methods and systems for shielding in sputtering chambers

申请公布号：US5482612(A)

申请号：US19940286586

申请日期：1994.08.05

申请公布日期：1996.01.09

申请人：

TEXAS INSTRUMENTS INCORPORATED

发明人：ARMSTRONG, FRANK O.;JEFFREYS, BRIAN B.

分类号：C23C14/56;H01J37/34;(IPC1-7):C23C14/34

主分类号：C23C14/56

摘要：An improved metal film deposition system is disclosed which comprises an improved shield (80) to prevent particulate contamination of processed wafers. The shield (80) includes an interstitial layer of flame-sprayed metal which adheres well to both the material comprising the metal film and the metal comprising the shield (80). Further, the shield utilizes radiused deflections (84) and (86) to disperse the forces created by the crystalline growth of the metal film.

BOBBIN HOLDING MECHANISM

ACTIVATED SLUDGE SEWAGE TREATMENT PROCESS

WERKWIJZE VOOR HET ONTWATEREN VAN SLIB EN DROOGVELD VOOR HET TOEPASSEN VAN DE WERKWIJZE

NOVEL POLYMER COMPOSITIONS

PERFECTIONNEMENTS AUX CORDES

CONNECTING ELEMENT FOR MUTUAL CONNECTION OF TWO PERPENDICULAR,PARTICULARLY CEILING AND WALL METALLIC U-SHAPED BEAMS

HJAELPMETALLHALTIG SINTERHAORDMETALL-LEGERING OCH FOERFARANDE FOER DESS FRAMSTAELLNING

NOVEL CYCLOSPORIN DERIVATIVES, THEIR PRODUCTION AND PHARMACEUTICAL COMPOSITIONS CONTAINING THEM

SPOSOB ZAPOBIEGANIA SPIEKANIU SIE STALYCH CZASTEK WEGLA W ZLOZU FLUIDALNYM

REAKTOR DO ZGAZOWYWANIA PALIW STALYCH,ZWLASZCZA WEGLA POD ZWIEKSZONYM CISNIENIEM

FLUORINATED ION EXCHANGE POLYMERS CONTAINING CARBOXYLIC GROUPS AND THEIR PRODUCTION

RECOMBINANT DNA TRANSFER VECTOR AND MICROOGRANISM CONTAINIG A GENE FROM A HIGHER ORGANISM

METHOD OF PRODUCING SLAB YARN

GATE VALUE

DISCCBRAKE USED PAD KEEP SPRING

PULPING METHOD OF NONN WOOD PLANT

METHOD FOR FORMING PIPE

SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE

PROCEDIMIENTO PARA PREPARAR 2-PROPIL-5-TIAZOL CARBOXILATO DE CALCIO Y LA SAL BASICA DE 2-PROPIL-5-TIAZOL-CARBOXILATO DE ALUMINIO