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MICRO PLASMA ENHANCE CUD APPARATUS AN THIN FILM TRANSISTOR AND APPLICATION APPARATUS THEREOF

申请公布号:KR950013426(B1)

申请号:KR19910003382

申请日期:1991.02.28

申请公布日期:1995.11.08

申请人:
HITACHI CO., LTD.

发明人:TODOROKI, SATORU;TANAKA, MASAHIRO;WATANABE, KUNIHIKO;NAKATANI, MIZUO

分类号:C23C16/511;G02F1/1368;H01L21/318;H01L21/77;H01L21/84;H01L29/49;(IPC1-7):H01L21/00

主分类号:C23C16/511

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