Verfahren und Apparatur zur Herstellung dünner Polyimid-Filme.,申请号DE1989621319-传众专利搜索

Verfahren und Apparatur zur Herstellung dünner Polyimid-Filme.

申请公布号：DE68921319(D1)

申请号：DE1989621319

申请日期：1989.12.28

申请公布日期：1995.03.30

申请人：

SHARP K.K., OSAKA, JP

发明人：AKAGI, YOSHIRO, OSAKA, JP;ISHINO, MARIKO, NARA-SHI NARA-KEN, JP;INOUE, ATSUHISA, KITAKATSURAGI-GUN NARA-KEN, JP;KAMINISHI, SHIGERU, KITAKATSURAGI-GUN NARA-KEN, JP;TANIGUCHI, HIROSHI, NARA-SHI NARA-KEN, JP

分类号：C08G73/10;G02F1/1337;(IPC1-7):C08G73/10;G02F1/133;B05D7/24;B05D5/12

主分类号：C08G73/10

摘要：<p>A method of manufacturing a polyimide thin film which comprises supplying vapors of a polyimide starting material comprising a plurality of polyimide forming monomers into a plasma atmosphere, transferring the ionized polyimide starting material, under an electric field, to the surface of a glass or metallic substrate and depositing thereon, and heating the same during or after deposition, thereby forming a polyimide thin film as an orientation film on the substrate, as well as an apparatus for manufacturing a polyimide thin film.</p>