FEED THROUGH PIN MADE OF COATED TANTALUM
申请公布号:JPH076932(A)
申请号:JP19940081056
申请日期:1994.03.29
申请公布日期:1995.01.10
发明人:RIN MARII SHIIFURIIDO;SUUZAN AN TETSUTEMAA
分类号:C22C27/02;H01B17/28;H01G4/228;H01G4/35;H01G13/00
主分类号:C22C27/02
摘要:PURPOSE: To solve an oxidation problem by providing a protective metal coating on a tantalum pin lead of a feedthrough structure so that the oxidation growth of tantalum in the pin lead can be controlled. CONSTITUTION: A feedthrough structure includes at least a single conductive tantalum pin 12. Part of the pin 12 is in contact with an insulator 14 and part therefor with a capacitor structure 16. In a method for electrically coupling the feedthrough structure with the capacitor structure, a protective conductive metal film 30 is given to at least a part of the tantalum pin that should come in contact with the capacitor structure, before the pin is brought into contact with the capacitor structure.