DIAMOND SYNTHESIS DEVICE,申请号JP19930053274-传众专利搜索

DIAMOND SYNTHESIS DEVICE

申请公布号：JPH06247792(A)

申请号：JP19930053274

申请日期：1993.02.19

申请公布日期：1994.09.06

申请人：

NEW JAPAN RADIO CO LTD

发明人：TAKAMURA FUMIO

分类号：C30B29/04;(IPC1-7):C30B29/04

主分类号：C30B29/04

摘要：<p>PURPOSE:To form a homogeneous diamond film in a wide area at the time of thermally decomposing a raw gas with a thermoelectron emitting material to synthesize diamond by heating the thermoelectron emitting material with a heating means through an insulating material. CONSTITUTION:A substrate 8 is placed on a substrate holder 7 in a vacuum vessel 9, and a thermoelectron emitting material 2 is arranged close to and in opposition to the substrate 8. A heater 4 is provided to heat the material 2, the heating part of the heater 4 is covered with an insulating material 3, and the insulating material 3 is brought into contact with the material 2. The material 2 is heated by the heater 4 through the insulating material 3 to emit a thermoelectron. A raw gas is simultaneously introduced from a raw gas inlet pipe 1, and a DC voltage is impressed on the material 2 and holder 7. Consequently, the raw gas is thermally decomposed by the thermoelectron emitted from the material 2, and diamond is synthesized on the substrate 8.</p>