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SEMICONDUCTOR DEVICE

申请公布号:JPH06140575(A)

申请号:JP19920311215

申请日期:1992.10.27

申请公布日期:1994.05.20

申请人:
HITACHI LTD;HITACHI VLSI ENG CORP

发明人:FUKAZAWA TAKESHI;YAJIMA HIRONOBU;IIDA HARUHITO;SAEKI AKIRA

分类号:H01L21/822;G11C11/407;H01L27/04;H01L29/78;(IPC1-7):H01L27/04;H01L29/784

主分类号:H01L21/822

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