High responsivity ultraviolet gallium nitride detector

申请公布号：AU4599993(A)

申请号：AU19930045999

申请日期：1993.06.08

申请公布日期：1994.01.04

申请人：

APA OPTICS, INC.

发明人：JAMES M VAN HOVE;JON N KUZNIA;DONALD T OLSON;MUHAMMAD ASIF KHAN;MARGARET C BLASINGAME

分类号：H01L31/0224;H01L31/0304;H01L31/18

主分类号：H01L31/0224

摘要：The invention is an AlxGa1-xN ultraviolet detector with extremely high responsivity at over 200 to 365 nanometers and a very sharp long wavelength cutoff. The active layer for the sensors is a single crystal AlxGa1-xN preferably deposited over a basal plane sapphire substrate using a switched atomic layer epitaxy process.

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