MANUFACTURE OF SEMICONDUCTOR DEVICE

申请公布号：JPH05326442(A)

申请号：JP19920154527

申请日期：1992.05.19

申请公布日期：1993.12.10

申请人：

SANYO ELECTRIC CO LTD

发明人：TANIMOTO SHINICHI;YONEDA KIYOSHI

分类号：H01L21/28;H01L21/768;(IPC1-7):H01L21/28;H01L21/90

主分类号：H01L21/28

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