SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
申请公布号:JPH05304268(A)
申请号:JP19920110228
申请日期:1992.04.28
申请公布日期:1993.11.16
发明人:IKEDA TOSHIMI;NOMURA HIROSHI
分类号:H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108
主分类号:H01L27/04
摘要:PURPOSE:To suppress a curve of a fin of a storage electrode relating to a semiconductor device having a fin-shaped stacked capacitor. CONSTITUTION:This semiconductor device composed including a first electrode of a fin construction formed of the films 11, 13, 15 for electrode forming to be composed by inserting at least one part of the intermediate layers 11b, 13b, 15b having the larger strength than the upper and lower conductive films 11a, 11c, 13a, 13c, 15a, 15c, and a dielectric film formed on the surface of the first electrode and a capacitor composed of a second electrode covering the dielectric film.
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