METHOD AND APPARATUS FOR MEASURING CONCENTRATION OF IRON ION IN IRON ETCHING LIQUID,申请号JP19910317232-传众专利搜索

METHOD AND APPARATUS FOR MEASURING CONCENTRATION OF IRON ION IN IRON ETCHING LIQUID

申请公布号：JPH05149909(A)

申请号：JP19910317232

申请日期：1991.12.02

申请公布日期：1993.06.15

申请人：

FUJI ELECTRIC CO LTD

发明人：SHIMIZU KOJI;SUZUKI KATSUHIDE;KUSAKA YUTAKA;TAKAHASHI TAKEO

分类号：C23F1/46;G01N27/26;G01N27/28;G01N27/49

主分类号：C23F1/46

摘要：PURPOSE:To obtain the method and the apparatus measurement, by which the attachment of sludge mixed etching liquid sampled from an etching vessel to a measuring electrode is prevented and the concentration of iron (II) irons in the etching liquid can be accurately measured continuously for a long time in the maintenance-free state. CONSTITUTION:Etching liquid 17, whose main component is iron (III) salt sampled from an etchng vessel 1, is introduced into a sampling vessel 12 having a measuring electrode 13. The concentration of iron (II) irons in the liquid is measured. In this measuring system, a settling vessel 15 as a sludge removing means is additionally provided at the front stage of the sampling vessel 12. The etching liquid is introduced into the sampling vessel 12 through the settling vessel 15, and the measurement is performed. Furthermore, the sampling cell 12 is made to be the cylindrical container. The flow speed of the etching liquid flowing through the vessel is set at 4cm/sec or more, and the measurement is performed. Such a method is also provided.