PRODUCTION OF THIN FILM

申请公布号：JPH0578192(A)

申请号：JP19910243776

申请日期：1991.09.24

申请公布日期：1993.03.30

申请人：

TOSHIBA CORP

发明人：KITAMURA MASARU

分类号：C23C14/30;C23C14/58;C30B23/08;C30B29/02;H01L21/203

主分类号：C23C14/30

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