APPARATUS AND METHOD FOR COATING A SUBSTRATE USING VACUUM ARC EVAPORATION

申请公布号：EP0508612(A3)

申请号：EP19920302218

申请日期：1992.03.13

申请公布日期：1993.02.17

申请人：

VAPOR TECHNOLOGIES INC.

发明人：WELTY, RICHARD P.

分类号：C23C14/24;C23C14/32;(IPC1-7):C23C14/24

主分类号：C23C14/24

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