Gas laser oscillation device and its optical axis alignment method.,申请号EP19910121680-传众专利搜索

Gas laser oscillation device and its optical axis alignment method.

申请公布号：EP0492385(A2)

申请号：EP19910121680

申请日期：1991.12.18

申请公布日期：1992.07.01

申请人：

MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

发明人：HONGU, HITOSHI

分类号：H01S3/081;H01S3/036;H01S3/07;H01S3/086

主分类号：H01S3/081

摘要：<p>A gas laser oscillator having two discharge tube columns, both ends of which are connected by a bending unit (18), wherein each column comprises two discharge tubes (1) connected in series. At the opposite ends of the bending unit, one column has a total-reflection mirror (6), and the other column has a partial-reflection mirror (7). These discharge tubes, the bending unit, the total-reflection mirror, and the partial-reflection mirror are mounted to a single optical bench (14). Each end of the discharge tubes is fixed to the optical bench (14) by means of clamp (15a, 15b, 15c, or 16). When counted from the clamp nearest to the partial-reflection mirror, the first clamp (15a), the fourth clamp (15b), and the eighth clamp (15c) are non-movable with respect to the optical bench, while the remaining clamps (16) are movable, and thus adjustable. One total-reflection mirror unit of the two total-reflection mirror units (19 and 20) on the bending unit (18) is non-movable, and the other total-reflection mirror unit is movable. <IMAGE></p>