LARGE SURFACE CATHODE ARRANGEMENT OF UNIFORM CONSUMPTION,申请号CA19912054238-传众专利搜索

LARGE SURFACE CATHODE ARRANGEMENT OF UNIFORM CONSUMPTION

申请公布号：CA2054238(A1)

申请号：CA19912054238

申请日期：1991.10.25

申请公布日期：1992.04.27

申请人：

MULTI-ARC OBERFLAECHENTECHNIK G.M.B.H.

发明人：CREMER, DIETER;DEDERICHS, HANS-GERHARD

分类号：C23C14/24;C23C14/34;C23F4/00;H01J37/32;H01J37/34;H01L21/00;(IPC1-7):C23C14/00

主分类号：C23C14/24

摘要：A large surface cathode arrangement with a consumable cathode plate that is connected via an intermediate plate with high electrical and thermal conductivity to a base plate is provided. The arrangement is provided with cooling channels. Current supply conduits and current supply locations for uniformly distributing the electrical current density, respectively, the electrical potential within the cathode plate are futhermore provided which allow the consumption of the cathode plate to become more uniform. Preferably, three or more current supply conduits are connected to a plurality of current supply locations that are uniformly distributed over the base plate. The cooling channels are provided at the face of the intermediate plate which is facing the base plate so that a continuous wall of the intermediate plate is in contact with the cathode plate, thus contributing to the improvement of the current distribution. The cathode arrangement is especially suitable for coating apparatus according to the PVD principle.