METHOD AND APPARATUS FOR FORMING A FILM

申请公布号：EP0383301(A3)

申请号：EP19900102897

申请日期：1990.02.14

申请公布日期：1991.11.21

申请人：

HITACHI, LTD.

发明人：MIYAKE, KIYOSHI, 9-13, HASHIKABE-2-CHOME;OHNO, YASUNORI;ISOGAI, MASATO;NAKAGAWA, YUKIO, 22-30 HOJO-1-CHOME;SEKI, TAKAYOSHI, TOZAWARYO;OUHATA, KOUKICHI, 18-13;NATSUI, KENICHI 18-12;WARABISAKO, TERUNORI, 2196-143;ARIMATSU, KEIJI, 8-6

分类号：C23C14/12;C23C14/34;(IPC1-7):C23C14/34;C23C14/32;C23C14/46

主分类号：C23C14/12

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