Workpiece table for handling semiconductor wafers

申请公布号：DE3943482(A1)

申请号：DE19893943482

申请日期：1989.05.08

申请公布日期：1990.11.15

申请人：

BALZERS AG, BALZERS, LI

发明人：WAGNER, RUDOLF, FONTNAS, CH;HIRSCHER, HANS, DR., BAD RAGAZ, CH

分类号：B23Q3/08;B65G49/00;C23C14/50;C23C14/54;C30B25/10;C30B25/12;C30B31/14;H01L21/302;H01L21/3065;H01L21/683;H01L21/687

主分类号：B23Q3/08

摘要：A table lift, for transporting thin disc-like workpieces such as silicon wafers from a lower feed-in position to a higher process chamber position, consists of a central column (3) which carries the worktable (5) at its top end. Further below, a large ring flangee (7) bears against the device housing. The same carries servo motors (12) which transmit their torque to axles (10) when the arms (14) with its fingers are to grip the work piece (6) or respectively to release it. After the workpiece is lifted into the vacuum chamber and sealed, the arms (14) are turned outwards by the servo motors (12), and thereby come to be placed below a protective ledge (34) so that the effect of the acid and other substance deposition applied to the workpiece will not be applied to the holding arms. While the transporting and holding gear is withdrawn, a loose ring surrounds the work piece thus keeping it in place.

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