MANUFACTURE OF SEMICONDUCTOR DEVICE

申请公布号：JPH029151(A)

申请号：JP19880160379

申请日期：1988.06.28

申请公布日期：1990.01.12

申请人：

FUJITSU LTD

发明人：MIYOSHI YASUTO

分类号：H01L21/768

主分类号：H01L21/768

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