SUPERCONDUCTIVE THIN FILM AND FORMATION OF SUPERCONDUCTIVE THIN FILM
申请公布号:JPH01205579(A)
申请号:JP19880028834
申请日期:1988.02.12
申请公布日期:1989.08.17
发明人:MIYAHARA KAZUNORI;AIHARA KIMIHISA;MIYAZAWA SHINTARO
分类号:H01L39/24;C23C14/08;C30B29/22;H01B13/00
主分类号:H01L39/24