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MANUFACTURE OF MOS-TYPE SEMICONDUCTOR DEVICE

申请公布号:JPH01205568(A)

申请号:JP19880030274

申请日期:1988.02.12

申请公布日期:1989.08.17

申请人:
SEIKO EPSON CORP

发明人:TANAKA KAZUO

分类号:H01L21/768;H01L21/31;H01L21/336;H01L29/78

主分类号:H01L21/768

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