MANUFACTURE OF GAS SENSOR,申请号JP19870064834-传众专利搜索

MANUFACTURE OF GAS SENSOR

申请公布号：JPS63229354(A)

申请号：JP19870064834

申请日期：1987.03.18

申请公布日期：1988.09.26

申请人：

OSAKA GAS CO LTD;TOSHIBA CORP

发明人：IPPONMATSU MASAMICHI;MATSUMOTO TAKESHI;YAKUSHIJI SHINGO;MATSUZAKA TAKASHI

分类号：G01N27/12

主分类号：G01N27/12

摘要：PURPOSE:To enhance a sensitivity ratio by forming an insulating metal membrane having high adhesive strength, by arranging the edge of the hole of a mask in a state spaced apart from the side edge of an electrode by a predetermined distance to perform sputtering. CONSTITUTION:Membrane like electrodes 6, 8 are formed on an N-type semiconductive membrane 4 changing in resistivity upon the response to gas and a mask 14 having a hole 16 is arranged thereon so that the edges 18, 20 thereof are spaced apart from the side edges of the electrodes by the distance 1.5 times or more the thickness of the mask 14 and, in this state, an insulating metal oxide membrane 22 is formed by sputtering. Therefore, the irregular structures reflected by the edge parts are limited to the electrodes and, since the regular membrane 22 having high adhesive strength can be formed on the membrane 4, a required sensitivity ratio can be obtained.