DIMENSION MEASURING APPARATUS USING ELECTRON BEAM,申请号JP19870023065-传众专利搜索

DIMENSION MEASURING APPARATUS USING ELECTRON BEAM

申请公布号：JPS63191012(A)

申请号：JP19870023065

申请日期：1987.02.02

申请公布日期：1988.08.08

申请人：

MATSUSHITA ELECTRONICS CORP

发明人：HARADA YOSHIKAZU

分类号：H01L21/66;G01B15/00;G01R31/302;H01J37/04;H01J37/22

主分类号：H01L21/66

摘要：PURPOSE:To achieve a setting of cursor surely and easily, by displaying the shape of a surface of a sample obtained by a secondary electron beam image together with the sectional shape of the sample obtained by an absorption electron current. CONSTITUTION:The amount of an absorption electron current as obtained when an electron beam is moved being irradiated on a semiconductor substrate 2 as ground of an electrode wire from the point E to the point E' is illustrated in superimposition with changes in the amount of absorption electron current as obtained when an electron beam is moved continuously in a linear path starting from the point D to points C, B, A, A', B', C' and D'. This illustration shows the sectional shape of an electrode film 1 as sample. Thus, a surface shape isometric view by a secondary electron beam image is displayed on the same video display terminal thereby facilitating cursor matching.