PHOTOCONDUCTIVE MEMBER
申请公布号:JPS6068671(A)
申请号:JP19830153675
申请日期:1983.08.23
申请公布日期:1985.04.19
发明人:SAITOU KEISHI
分类号:H01L31/0248;H01L31/09;(IPC1-7):H01L31/08
主分类号:H01L31/0248
摘要:PURPOSE:To always stabilize electrical and optical photoconductive characteristics by forming the distributed state of germanium atoms in the first layer which exhibits photoconductivity irregular in the thicknesswise direction. CONSTITUTION:A photoconductive member 100 has the first layer 102 having photoconductivity made of a-SiGe(H, X) and the second layer 103 on a support 102 as a photoconductive member in such a manner that the layer 103 has free surface. The germanium atoms contained in the layer 102 are distributed continuously uniformly in planar direction parallel to the thicknesswise direction of the layer 102 and contained in the layer 102 so as to be distributed more at the side of the support 101 to the opposite side formed with the support 101. In other words, the first layer is preferably contained with local region containing relatively high density of germanium atoms at the support side. Particularly, they are preferable to be provided within 5mum from the boundary position.
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